A new integrated poly-SiGe-based piezoresistive pressure sensor has been directly fabricated above 0.13 µm copper (Cu) -backend CMOS technology. This represents not only the first integrated poly ...

Are you considering using a MEMS piezoresistive pressure sensor for your application? Or would you simply like to know more about piezoresistive technology on silicon dies? Merit Sensor designs and ...

ASB1200V This article describes the calibration and compensation of piezoresistive pressure sensors. Basic circuit properties of external circuits are calculated as an example of bare C32 pressure ...

Imec realized an integrated poly-SiGe-based piezoresistive pressure sensor directly fabricated above 0.13 um copper-backend CMOS technology. This represents not only the first integrated poly-SiGe ...